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主要特点Main features
前端配有预热炉，可用于蒸发固态源
Equipped with a preheating furnace for evaporating solid state sources
加热炉选用滑轨炉，可实现快速升温/降温，缩短实验时间
Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.
法兰端采用卡箍密封，这样就使进料出料更加的方便。
The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
进气系统可以按照客户的实验需求配置几路质量流量计，流量计的量程也可以选择不同的配置，真空系统也可以根据客户的需求选择配置各种真空泵。
Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurations. The vacuum system can also be configured with various vacuum pumps according to customer requirements
